Characterization of metal and metal alloy films as contact materials in MEMS switches

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چکیده

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ژورنال

عنوان ژورنال: Journal of Micromechanics and Microengineering

سال: 2006

ISSN: 0960-1317,1361-6439

DOI: 10.1088/0960-1317/16/3/011